Method of making semiconductor device having first and second epitaxial materials

ABSTRACT

A method of manufacturing a semiconductor device includes forming a first gate stack over a substrate. The method further includes etching the substrate to define a cavity. The method further includes growing a first epitaxial (epi) material in the cavity, wherein the first epi material includes a first upper surface having a first crystal plane. The method further includes growing a second epi material on the first epi material, wherein the second epi material includes a second upper surface having the first crystal plane. The method further includes treating the second epi material, wherein treating the second epi material comprises causing the second upper surface to transform to a second crystal plane different from the first crystal plane.

PRIORITY CLAIM

The present application is a continuation of U.S. application Ser. No.15/837,546, filed Dec. 11, 2017, which is a continuation of U.S.application Ser. No. 15/209,103, filed Jul. 13, 2016, now U.S. Pat. No.9,842,930, issued Dec. 12, 2017, which is a divisional of U.S.application Ser. No. 14/567,329, filed Dec. 11, 2014, now U.S. Pat. No.9,401,426, issued Jul. 26, 2016, which is a divisional of U.S.application Ser. No. 13/252,346, filed Oct. 4, 2011, now U.S. Pat. No.8,927,374, issued Jan. 6, 2015, which are incorporated herein byreference in their entireties.

FIELD

The disclosure relates to integrated circuit fabrication and, moreparticularly, to a semiconductor device with a strained structure.

BACKGROUND

When a semiconductor device, such as a metal-oxide-semiconductorfield-effect transistor (MOSFET), is scaled down through varioustechnology nodes, high-k gate dielectric layers and metal gate electrodelayers are incorporated into the gate stack of the MOSFET to improvedevice performance with the decreased feature sizes. In addition,strained structures in source and drain (S/D) recess cavities of theMOSFET utilizing selectively grown silicon germanium (SiGe) may be usedto enhance carrier mobility.

However, there are challenges to implement such features and processesin complementary metal-oxide-semiconductor (CMOS) fabrication. As thegate length and spacing between devices decrease, these problems areexacerbated. For example, it is difficult to achieve enhanced carriermobility for a semiconductor device, because strained materials cannotdeliver a given amount of strain into the channel region of thesemiconductor device, thereby increasing the likelihood of deviceinstability and/or device failure.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure is best understood from the following detaileddescription when read with the accompanying figures. It is emphasizedthat, in accordance with the standard practice in the industry, variousfeatures are not drawn to scale and are used for illustration purposesonly. In fact, the relative dimensions of the various features may bearbitrarily increased or reduced for clarity of discussion.

FIG. 1 is a flowchart illustrating a method for fabricating asemiconductor device comprising a strained structure according tovarious aspects of the present disclosure.

FIGS. 2-5, 5A and 6-8 show schematic cross-sectional views of a strainedstructure of a semiconductor device at various stages of fabricationaccording to various aspects of the present disclosure.

DESCRIPTION

It is understood that the following disclosure provides many differentembodiments, or examples, for implementing different features of thedisclosure. Specific examples of components and arrangements aredescribed below to simplify the present disclosure. These are, ofcourse, merely examples and are not intended to be limiting. Forexample, the formation of a first feature over or on a second feature inthe description that follows may include embodiments in which the firstand second features are formed in direct contact, and may also includeembodiments in which additional features may be formed between the firstand second features, such that the first and second features may not bein direct contact. In addition, the present disclosure may repeatreference numerals and/or letters in the various examples. Thisrepetition is for the purpose of simplicity and clarity and does not initself dictate a relationship between the various embodiments and/orconfigurations discussed.

FIG. 1 is a flowchart illustrating a method 100 for fabricating asemiconductor device 200 according to various aspects of the presentdisclosure. FIGS. 2-8 show schematic cross-sectional views of asemiconductor device 200 at various stages of fabrication according toan embodiment of the method 100 of FIG. 1. The semiconductor device 200may be included in a microprocessor, memory cell, and/or otherintegrated circuit (IC). It is noted that the method of FIG. 1 does notproduce a completed semiconductor device 200. A completed semiconductordevice 200 may be fabricated using complementarymetal-oxide-semiconductor (CMOS) technology processing. Accordingly, itis understood that additional processes may be provided before, during,and after the method 100 of FIG. 1, and that some other processes mayonly be briefly described herein. Also, FIGS. 1 through 8 are simplifiedfor a better understanding of the present disclosure. For example,although the figures illustrate the semiconductor device 200, it isunderstood the IC may comprise a number of other devices comprisingresistors, capacitors, inductors, fuses, etc.

Referring to FIGS. 1 and 2, the method 100 begins at step 102 wherein asubstrate 202 comprising a surface 202 s is provided. In one embodiment,the substrate 202 comprises a crystalline silicon substrate (e.g.,wafer). In the present embodiment, the substrate 202 is referred to as a(100) substrate having the surface 202 s formed of the (100) crystalplane. In an alternative embodiment, the substrate 202 may include asilicon-on-insulator (SOI) structure.

The substrate 202 may further comprise active regions 204. The activeregions 204 may include various doping configurations depending ondesign requirements. In some embodiments, the active regions 204 may bedoped with p-type or n-type dopants. For example, the active regions 204may be doped with p-type dopants, using a chemical such as boron or BF₂to perform the doping; n-type dopants, using a chemical such asphosphorus or arsenic to perform the doping; and/or combinationsthereof. The active regions 204 may act as regions configured for aN-type metal-oxide-semiconductor transistor device (referred to as anNMOS) and regions configured for a P-type metal-oxide-semiconductortransistor device (referred to as a PMOS).

In some embodiments, isolation structures 206 a and 206 b are formed inthe substrate 202 to isolate the various active regions 204. Theisolation structures 206 a and 206 b, for example, are formed usingisolation technology, such as local oxidation of silicon (LOCOS) orshallow trench isolation (STI), to define and electrically isolate thevarious active regions 204. In the present embodiment, the isolationstructures 206 a and 206 b include a STI. The isolation structures 206 aand 206 b may comprise silicon oxide, silicon nitride, siliconoxynitride, fluoride-doped silicate glass (FSG), a low-K dielectricmaterial, other suitable materials, and/or combinations thereof. Theisolation structures 206 a and 206 b, and in the present embodiment theSTI, may be formed by any suitable process. As one example, theformation of the STI may include patterning the semiconductor substrate202 by a photolithography process, etching a trench in the substrate 202(for example, by using a dry etching, wet etching, and/or plasma etchingprocess), and filling the trench (for example, by using a chemical vapordeposition process) with a dielectric material. In some embodiments, thefilled trench may have a multi-layer structure such as a thermal oxideliner layer filled with silicon nitride or silicon oxide.

Still referring to FIG. 2, in at least one embodiment, gate stacks 210a, 210 b, and 210 c are formed over the surface 202 s of the substrate202. In some embodiments, the gate stacks 210 a, 210 b, and 210 c areformed by sequentially depositing and patterning a gate dielectric layer212, a gate electrode layer 214, and a hard mask layer 216 on thesubstrate 202.

The gate dielectric layer 212, in one example, is a thin film comprisingsilicon oxide, silicon nitride, silicon oxynitride, high-k dielectrics,other suitable dielectric materials, or combinations thereof. High-kdielectrics comprise metal oxides. Examples of metal oxides used forhigh-k dielectrics include oxides of Li, Be, Mg, Ca, Sr, Sc, Y, Zr, Hf,Al, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu and mixturesthereof. In the present embodiment, the gate dielectric layer 212 is ahigh-k dielectric layer with a thickness in the range of about 10angstroms to about 30 angstroms. The gate dielectric layer 212 may beformed using a suitable process such as atomic layer deposition (ALD),chemical vapor deposition (CVD), physical vapor deposition (PVD),thermal oxidation, UV-ozone oxidation, or combinations thereof. The gatedielectric layer 212 may further comprise an interfacial layer (notshown) to reduce damage between the gate dielectric layer 212 andsubstrate 202. The interfacial layer may comprise silicon oxide.

The gate electrode layer 214 is then formed on the gate dielectric layer212. In some embodiments, the gate electrode layer 214 may comprise asingle layer or multilayer structure. In the present embodiment, thegate electrode layer 214 may comprise polysilicon. Further, the gateelectrode layer 214 may be doped polysilicon with the same or differentdoping species. In one embodiment, the gate electrode layer 214 has athickness in the range of about 30 nm to about 60 nm. The gate electrodelayer 214 may be formed using a process such as low-pressure chemicalvapor deposition (LPCVD), plasma enhanced chemical vapor deposition(PECVD), other suitable processes, or combinations thereof.

Next, the hard mask layer 216 is formed over the gate electrode layer214 and a patterned photo-sensitive layer (not shown) is formed on thehard mask layer 216. The pattern of the photo-sensitive layer istransferred to the hard mask layer 216 and then transferred to the gateelectrode layer 214 and gate dielectric layer 212 to form the gatestacks 210 a, 210 b, and 210 c over the surface 202 s of the substrate202. In some embodiments, the hard mask layer 216 comprises siliconoxide. Alternatively, the hard mask layer 216 may comprise siliconnitride, silicon oxynitride, and/or other suitable dielectric materials,and may be formed using a method such as CVD or PVD. The hard mask layer216 has a thickness in the range from about 100 angstroms to about 800angstroms. The photo-sensitive layer is stripped thereafter by a dryand/or wet stripping process.

Referring to FIGS. 1 and 3, the method 100 proceeds to step 104 whereingate spacers 218 are formed overlying opposite sidewalls of the gatestacks 210 a, 210 b, and 210 c. In the present embodiment, the gatespacers 218 adjoin sidewalls of the gate stacks 210 a, 210 b. In someembodiments, the gate spacers 218 may include a single-layer or amultiple-layer structure. In the present embodiment, a blanket layer ofspacer material (not shown) is formed over the gate stacks 210 a, 210 b,and 210 c by a deposition process including CVD, PVD, ALD, or othersuitable techniques. In some embodiments, the spacer material comprisessilicon oxide, silicon nitride, silicon oxynitride, other suitablematerial, or combinations thereof. In some embodiments, the spacermaterial has a thickness ranging from about 5 nm to about 15 nm. Then,an anisotropic etching is performed on the spacer material to form thegate spacers 218.

Referring to FIGS. 1 and 4, the method 100 continues with step 106 inwhich the substrate 202 is recessed to form recess cavities 220, 230,240, and 250 in the substrate 202. In some embodiments, the recesscavities 220, 230, 240, and 250 are source and drain (S/D) recesscavities. In the structure of FIG. 4, the recess cavities 220 and 250are formed between the gate stack 210 a/the isolation structure 206 aand the gate stack 210 c/the isolation structure 206 b, respectively.The recess cavities 230 and 240 are formed between the gate stacks 210a/210 b and 210 b/210 c, respectively.

In the present embodiment, the processes for forming the recess cavities220, 230, 240, and 250 are started using an isotropic dry etchingprocess, followed by an anisotropic wet or dry etching process. In someembodiments, the isotropic dry etching process is performed using thegate spacers 218 and isolation structures 206 a and 206 b as hard masksto recess the surface 202 s of the substrate 202 that is unprotected bythe gate spacers 218 or the isolation structures 206 a and 206 b to forminitial recess cavities (not shown) in the substrate 202. In anembodiment, the isotropic dry etching process may be performed under apressure of about 1 mTorr to about 1000 mTorr, a power of about 50 W toabout 1000 W, a bias voltage of about 20 V to about 500 V, at atemperature of about 40° C. to about 60° C., using HBr and/or Cl₂ asetch gases. Also, in the embodiments provided, the bias voltage used inthe isotropic dry etching process may be tuned to allow better controlof an etching direction to achieve desired profiles for the S/D recessregions.

In some embodiments, a wet etching process is then provided to enlargethe initial recess cavities to form the recess cavities 220, 230, 240,and 250. In some embodiments, the wet etching process is performed usinga chemical comprising hydration tetramethyl ammonium (TMAH), or thelike. As a result of such etching processes, there may be formed aplurality of facets in each recess cavities 220, 230, 240, and 250. Itshould be noted that periphery environment with or without an etch stopcan influence resultant features of the S/D recess cavities 220, 230,240, and 250. During the wet etching process, the isolation structure206 a may function as an etch stop for defining the recess cavity 220between the gate stack 210 a and isolation structure 206 a. In someembodiments, the recess cavity 220 between the gate stack 210 a andisolation structure 206 a have respective sidewall surfaces defined by abottom facet 220 c, an upper sidewall facet 220 a, lower sidewall facets220 b and 220 d, and an upper portion of the sidewall of the isolationstructure 206 a. Thereby, the facet 220 a and facet 220 b thus formedintersect each other and together define a wedge 220 w in the recesscavity 220, such that the wedge-shaped recess cavity 220 extends intothe substrate 202 in the region right underneath the spacer 218 towardthe channel region. In some embodiments, the recess cavity 230 betweenthe adjacent gate stacks 210 a and 210 b, without an etch stop, haverespective sidewall surfaces each defined by a bottom facet 230 c, uppersidewall facets 230 a, 230 e, and lower sidewall facets 230 b and 230 d.Thereby, the facet 230 d and facet 230 e thus formed intersect eachother and together define a wedge 230 w in the recess cavity 230, suchthat the wedge-shaped recess cavity 230 extends into the substrate 202in the region right underneath the spacer 218 toward the channel region.

In the illustrated example, the bottom facets 220 c, 230 c are formed of(100) crystal plane parallel to the crystal plane of the surface 202 sof the substrate 202. In the illustrated example, the upper sidewallfacets 220 a, 230 a, and 230 e and the lower sidewall facets 220 b, 220d, 230 b, and 230 d are formed of (111) crystal plane, and the uppersidewall facets 220 a and 230 a form an angle θ₁ to the bottom facets220 c and 230 c. Further, the lower sidewall facets 220 b and 230 b forma smaller angle θ₂ than the angle θ₁ with respect to the bottom facets220 c and 230 c. In the structure of FIG. 4, the angle θ₁ takes therange of about 90 degrees to about 150 degrees, while the angle θ₂ takesthe range of about 40 degrees to about 60 degrees. In the presentembodiment, the angles θ₁, θ₂ take the values of about 146 degrees andabout 56 degrees, respectively in the case the facets 220 a, 230 a, 220b, and 230 b are formed by the (111) crystal plane of the substrate 202.However, it should be noted that the structure of FIG. 4 is not limitedto the case in which the facets 220 a, 230 a, 220 b, and 230 b areformed by the (111) crystal plane.

Further, the bottom facet 220 c is formed at a depth D₁ as measured fromthe surface 202 s of the substrate 202, while the upper facet 220 a isformed down to a depth D₂. In the structure of FIG. 4, the depth D₁ isin the range of about 20 nm to about 70 nm, while the depth D₂ is in therange of about 5 nm to about 60 nm. By optimizing the depth D₂ and adistance between the mutually opposing wedges 220 w, 230 w, it becomespossible to confine the uni-axial compressive stress of a strainedmaterial 222 (shown in FIG. 5) effectively to the channel region,thereby enhancing the device performance.

The process steps up to this point have provided the substrate 202having the recess cavities 220, 230, 240, 250 adjacent to the gatestacks 210 a, 210 b, and 210 c. Referring to FIGS. 1 and 5, the method100 continues with step 108 in which a strained material 222 is grown inthe recess cavities 220, 230, 240, 250 of the substrate 202 using aprocess including selective epitaxy growth (SEG), cyclic deposition andetching (CDE), chemical vapor deposition (CVD) techniques (e.g.,vapor-phase epitaxy (VPE) and/or ultra-high vacuum CVD (UHV-CVD)),molecular beam epitaxy (MBE), other suitable epi processes, orcombinations thereof. In some embodiments, the strained material 222 hasa lattice constant different from the substrate 202 to induce a strainor stress on the channel region of the semiconductor device 200, andtherefore enable carrier mobility of the device to enhance the deviceperformance.

In the present embodiment, a pre-cleaning process is performed to cleanthe recess cavities 220, 230, 240, 250 using a chemical comprisinghydrofluoric acid (HF) or other suitable solution. Then, gaseous and/orliquid precursors may be provided to interact with the composition ofthe substrate 202 to form the strained material 222, such as silicongermanium (SiGe), to fill the recess cavities 220, 230, 240, 250. In oneembodiment, the process for forming the strained material 222 comprisingSiGe is performed at a temperature of about 600° to 750° C. and under apressure of about 10 Torr to about 80 Torr, using reaction gasescomprising SiH₂Cl₂, HCl, GeH₄, B₂H₆, H₂, or combinations thereof. Insome embodiments, a ratio of a mass flow rate of the SiH₂Cl₂ to a massflow rate of the HCl is in the range of about 0.45 to 0.55. In oneembodiment, the strained material 222 is therefore grown from the facets230 a, 230 b, 230 c, 230 d, and 230 e to the center of the recess cavity230 in the substrate 202. In another embodiment, the strained material222 is therefore grown from the facets 220 a, 220 b, 220 c, and 220 d tothe center of the recess cavity 220 in the substrate 202.

In some embodiments, the growth of the strained material 222 in therecess cavity 230 that is not adjacent to the isolation structure 206 ais mainly along the facet 230 c and therefore has an upper surface 222 aformed of (100) crystal plane. In the present embodiment, the growth ofthe strained material 222 in the recess cavity 220 that is adjacent tothe isolation structure 206 a is limited by the isolation structure 206a because the isolation structure 206 a formed by a dielectric with anamorphous structure fails to offer nucleation sites to grow an epitaxialmaterial. In some embodiments, the growth of the strained material 222in the recess cavity 220 tends to have an upper surface 222 b formed of(111) crystal plane with a stable surface energy. The strained material222 in the recess cavity 220 has a lower sidewall surface 222 c formedover the lower sidewall facet 220 b and therefore is formed of (111)crystal plane. In some embodiments, the lower sidewall surface 222 c isparallel to the upper surface 222 b. It can be seen in FIG. 5 that thestrained material 222 adjacent to the isolation structure 206 a occupiesa small portion of the recess cavity 220.

In FIG. 5A, the semiconductor device 200 is enlarged for betterunderstanding of the profile of the strained material 222 in the recesscavity 220. In the present embodiment, the strained material 222 in therecess cavity 220 has a corner 222 d adjacent to the edge of the gatestack 210 a and having a tip higher than the surface 202 s of thesubstrate 202. The corner 222 d has a height D3 measured from thesurface 202 s to the tip of the corner 222 d. In some embodiments, theheight D3 ranges between about 1 nm and about 10 nm.

Referring to FIGS. 1 and 6, the method 100 continues with step 110 inwhich a cap layer 224 is formed over the strained material 222. In thepresent embodiment, the cap layer 224 is formed by an epi growthprocess. In some embodiments, the cap layer 224 functions as aprotection layer to prevent undulation of the underlying strainedmaterial 222 in a subsequent treatment process. The cap layer 224 overthe strained material 222 in the recess cavity 230, which is notadjacent to the isolation structure 206 a, has a thickness D4. In someembodiments, the thickness D4 ranges between about 1 nm and about 5 nm.The cap layer 224 over the strained material 222 in the recess cavity220 and adjacent to the isolation structure 206 a has a sidewall 224 ccontacting the isolation structure 206 a with a thickness D5. In someembodiments, a ratio of the thickness D4 over the thickness D5 rangesbetween about 1 nm and about 3 nm. In some embodiments, the cap layer224 over the strained material 222 in the recess cavities 230 may growalong the crystal orientation of the upper surface 222 a and has anupper surface 224 a formed of (100) crystal plane. In some embodiments,the cap layer 224 over the strained material 222 in the recess cavities220 may grow along the crystal direction of the upper surface 222 b andhas an upper surface 224 b formed of (111) crystal plane.

In some embodiments, the cap layer 224 comprises a material differentfrom the strained material 222. In some embodiments, the cap layer 224is a silicon-containing layer. In the present embodiment, the cap layer224 is silicon. In some embodiments, the cap layer 224 is formed by aprocess including selective epitaxy growth (SEG), cyclic deposition andetching (CDE), chemical vapor deposition (CVD) techniques (e.g.,vapor-phase epitaxy (VPE) and/or ultra-high vacuum CVD (UHV-CVD)),molecular beam epitaxy (MBE), other suitable epi processes, orcombinations thereof. In the present embodiment, the cap layer 224 isformed by a process same as to the process for forming the strainedmaterial 222. In some embodiments, the cap layer 224 is continuouslyformed after forming the strained material 222 by changing the processconditions to be performed at a temperature of about 700° C. to about800° C., under a pressure of about 10 Torr to about 50 Torr, and using asilicon-containing gas (e.g., SiH₂Cl₂) as reaction gas. In analternative embodiment, B₂H₆ and/or H₂ are introduced with thesilicon-containing gas for forming the cap layer 224.

Referring to FIGS. 1 and 7, the method 100 continues with step 112 inwhich a treatment is provided to the semiconductor device 200. In someembodiments, the treatment is a heating process. In some embodiments,the treatment is performed at a temperature higher than the temperaturefor forming the cap layer 224 and/or the temperature for forming thestrained material 222. In some embodiments, the treatment is performedat a temperature ranging between about 650° C. to about 850° C. In someembodiments, the treatment is performed under a pressure of about 10Torr to about 50 Torr and lasting for a period of time not less thanabout 30 seconds. In some embodiments, a carrier gas (e.g., H₂) with aflow rate of about 35 slm to about 40 slm (standard liters per minute)is introduced in the treatment process for thermal conduction.

After the treatment process, in some embodiments, at least a portion ofthe corner 222 d of the strained material 222 is redistributed in therecess cavity 220, thereby increasing an amount of the strained material222 in the recess cavity 220. In one embodiment, the corner 222 d abovethe surface 202 s of the substrate 202 is completely redistributed inthe recess cavity 220, therefore all the strained material 222 is withinthe recess cavity 220. The increased amount of the strained material 222in the recess cavity 220 may fabricate a large-volume strained structureto enhance carrier mobility and upgrade the device performance of thesemiconductor device 200.

In one embodiment, the redistribution results from reducing the highsurface energy of the tip in corner 222 d. In an alternative embodiment,the redistribution is results from a reflow process in the treatment.The original upper surface 222 b of the strained material 222 in therecess cavity 220 is transformed into a treated upper surface 222 b′after the treatment. In some embodiments, the treated upper surface 222b′ has a transformed crystal plane which deviates from the original(111) crystal plane, therefore, the lower sidewall surface 222 c of thestrained material 222 is not parallel to the treated upper surface 222b′. In the present embodiment, the treated upper surface 222 b′ has a(311) crystal plane. Accordingly, the upper surface 224 b of theoverlying cap layer 224 may be transformed into a treated upper surface224 b′. In some embodiments, the treated upper surface 224 b′ istransformed from the original (111) crystal plane to the deviated-from(111) crystal plane. In the present embodiment, the treated uppersurface 224 b′ has a (311) crystal plane. In some embodiments, thecrystal orientation of the upper surface 222 a of the strained material222 in the recess cavity 230 is not changed after the treatment.

Referring to FIGS. 1 and 8, the method 100 continues with step 114 inwhich contact features 226 are formed over the cap layer 224. In thepresent embodiment, the contact features 226 are formed by a processthat is the same as the process for forming the strained material 222 orthe cap layer 224. The contact features 226 may provide a low contactresistance between the cap layer 224 and a silicide structure formedsubsequently. In at least one embodiment, the contact features 226 havea thickness ranging from about 150 Angstroms to about 200 Angstroms. Insome embodiments, the contact features 226 comprise a material that isthe same as the material of cap layer 224. In alternative embodiments,the contact features 226 comprise a material same as to the material ofstrain material 222.

It is understood that the semiconductor device 200 may undergo furtherCMOS processes to form various features such as contacts/vias,interconnect metal layers, dielectric layers, passivation layers, etc.In some embodiments, the gate stacks 210 a, 210 b, 210 c may be dummygate stacks. Thus, the CMOS processes further comprise a “gate last”process to replace the polysilicon gate electrode with a metal gateelectrode to improve device performance. In one embodiment, the metalgate electrode may include a metal such as Al, Cu, W, Ti, Ta, TiN, TiAl,TiAlN, TaN, NiSi, CoSi, other suitable conductive materials, orcombinations thereof. It has been observed that the modified strainedstructure provides a given amount of strain into the channel region of asemiconductor device, thereby enhancing the device performance.

The various embodiments of the present disclosure discussed above offeradvantages over previously known methods, it being understood that noparticular advantage is required for all embodiments, and that differentembodiments may offer different advantages. One of the advantages isthat the lower portion of the strained material in the S/D recess cavityadjacent to the isolation structure may be increased to enhance carriermobility and upgrade the device performance. Another advantage is thatthe likelihood of device instability and/or device failure resultingfrom forming a subsequent silicide over the lower portion of thestrained material may be prevented.

An aspect of this description relates to a method of manufacturing asemiconductor device. The method includes forming a first gate stackover a substrate. The method further includes etching the substrate todefine a cavity. The method further includes growing a first epitaxial(epi) material in the cavity, wherein the first epi material includes afirst upper surface having a first crystal plane. The method furtherincludes growing a second epi material on the first epi material,wherein the second epi material includes a second upper surface havingthe first crystal plane. The method further includes treating the secondepi material, wherein treating the second epi material comprises causingthe second upper surface to transform to a second crystal planedifferent from the first crystal plane. In some embodiments, the methodfurther includes forming an isolation structure in the substrate. Insome embodiments, etching the substrate includes defining the cavityadjacent to the isolation structure. In some embodiments, etching thesubstrate includes exposing a sidewall of the isolation structure. Insome embodiments, treating the second epi material includes heating thesecond epi material. In some embodiments, heating the second epimaterial includes heating the second epi material at a temperatureranging from about 650° C. to about 850° C. In some embodiments,treating the second epi material includes treating the second epimaterial under a pressure ranging from about 10 Torr to about 50 Torr.In some embodiments, treating the second epi material includes treatingthe second epi material for at least 30 seconds. In some embodiments,treating the second epi material includes exposing the second epimaterial to a gas. In some embodiments, exposing the second epi materialto the gas includes exposing the second epi material to hydrogen gas.

An aspect of this description relates to a method of manufacturing asemiconductor device. The method includes forming a first gate stackover a substrate. The method further includes etching the substrate todefine a cavity. The method further includes growing a first epitaxial(epi) material in the cavity, wherein the first epi material includes afirst upper surface having a (111) crystal plane. The method furtherincludes growing a second epi material on the first epi material,wherein the second epi material includes a second upper surface havingthe (111) crystal plane. The method further includes treating the secondepi material, wherein treating the second epi material comprises causingthe second upper surface to transform to (311) crystal plane. In someembodiments, growing the second epi material includes growing the secondepi material comprising a different material from the first epimaterial. In some embodiments, growing the second epi material includesgrowing a silicon-containing material. In some embodiments, growing thefirst epi material includes growing the first epi material using firstprocess conditions, and growing the second epi material includes growingthe second epi material using second process conditions. In someembodiments, growing the second epi material includes growing the secondepi material in a continuous process with growing the first epi materialby changing from the first process conditions to the second processconditions.

An aspect of this description relates to a method of manufacturing asemiconductor device. The method includes forming a first gate stackover a substrate. The method further includes etching the substrate todefine a cavity. The method further includes growing a first epitaxial(epi) material in the cavity, wherein the first epi material includes afirst upper surface having a (111) crystal plane. The method furtherincludes treating the first epi material, wherein treating the first epimaterial comprises causing the first upper surface to transform to a(311) crystal plane. In some embodiments, etching the substrate includesdefining a second cavity on an opposite side of the first gate stackfrom the cavity. In some embodiments, the method further includesgrowing a strained material in the second cavity. In some embodiments,growing the first epi material includes growing the first epi materialover the strained material. In some embodiments, growing the first epimaterial includes growing the first epi material over the strainedmaterial having a surface having a (100) crystal plane.

While the disclosure has described by way of example and in terms of thepreferred embodiments, it is to be understood that the disclosure is notlimited to the disclosed embodiments. To the contrary, it is intended tocover various modifications and similar arrangements (as would beapparent to those skilled in the art). Therefore, the scope of theappended claims should be accorded the broadest interpretation so as toencompass all such modifications and similar arrangements.

What is claimed is:
 1. A method of manufacturing a semiconductor device,the method comprising: forming a first gate stack over a substrate;etching the substrate to define a cavity; growing a first epitaxial(epi) material in the cavity, wherein the first epi material includes afirst upper surface having a first crystal plane; growing a second epimaterial on the first epi material, wherein the second epi materialincludes a second upper surface having the first crystal plane; andtreating the second epi material, wherein treating the second epimaterial comprises causing the second upper surface to transform to asecond crystal plane different from the first crystal plane.
 2. Themethod of claim 1, further comprising forming an isolation structure inthe substrate.
 3. The method of claim 2, wherein etching the substratecomprises defining the cavity adjacent to the isolation structure. 4.The method of claim 2, wherein etching the substrate comprises exposinga sidewall of the isolation structure.
 5. The method of claim 1, whereintreating the second epi material comprises heating the second epimaterial.
 6. The method of claim 5, wherein heating the second epimaterial comprises heating the second epi material at a temperatureranging from about 650° C. to about 850° C.
 7. The method of claim 1,wherein treating the second epi material comprises treating the secondepi material under a pressure ranging from about 10 Torr to about 50Torr.
 8. The method of claim 7, wherein treating the second epi materialcomprises treating the second epi material for at least 30 seconds. 9.The method of claim 1, wherein treating the second epi materialcomprises exposing the second epi material to a gas.
 10. The method ofclaim 9, wherein exposing the second epi material to the gas comprisesexposing the second epi material to hydrogen gas.
 11. A method ofmanufacturing a semiconductor device, the method comprising: forming afirst gate stack over a substrate; etching the substrate to define acavity; growing a first epitaxial (epi) material in the cavity, whereinthe first epi material includes a first upper surface having a (111)crystal plane; growing a second epi material on the first epi material,wherein the second epi material includes a second upper surface havingthe (111) crystal plane; and treating the second epi material, whereintreating the second epi material comprises causing the second uppersurface to transform to (311) crystal plane.
 12. The method of claim 11,wherein growing the second epi material comprises growing the second epimaterial comprising a different material from the first epi material.13. The method of claim 11, wherein growing the second epi materialcomprises growing a silicon-containing material.
 14. The method of claim11, wherein growing the first epi material comprises growing the firstepi material using first process conditions, and growing the second epimaterial comprises growing the second epi material using second processconditions.
 15. The method of claim 14, wherein growing the second epimaterial comprises growing the second epi material in a continuousprocess with growing the first epi material by changing from the firstprocess conditions to the second process conditions.
 16. A method ofmanufacturing a semiconductor device, the method comprising: forming afirst gate stack over a substrate; etching the substrate to define acavity; growing a first epitaxial (epi) material in the cavity, whereinthe first epi material includes a first upper surface having a (111)crystal plane; and treating the first epi material, wherein treating thefirst epi material comprises causing the first upper surface totransform to a (311) crystal plane.
 17. The method of claim 16, whereinetching the substrate comprises defining a second cavity on an oppositeside of the first gate stack from the cavity.
 18. The method of claim17, further comprising growing a strained material in the second cavity.19. The method of claim 18, wherein growing the first epi materialcomprises growing the first epi material over the strained material. 20.The method of claim 19, wherein growing the first epi material comprisesgrowing the first epi material over the strained material having asurface having a (100) crystal plane.